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Conte Nanotechnology Cleanroom Lab
For more information: http://nano.pse.umass.edu/
1,400 sq. ft. Class 1000 clean room (Conte B-132)
- Deposition of Si, SiO2, Si3N4, amorphous Si
- Etching of Si and derivatives, resists, IT, etc.
- Acid etch
- Solvent rinse
- Wafer cleaning
- Electroplating
Metrology